-40%

C168900 Plasma Immersion Ion Implanter PIII Vacuum Chamber RF Match & Controller

$ 10560

Availability: 100 in stock
  • Condition: Not complete, missing turbo pumps. Unable to power up or test.
  • Equipment Type: Plasma Deposition System
  • All returns accepted: ReturnsNotAccepted
  • Technology: Ion Implant

    Description

    This Plasma Immersion Ion Implanter (PIII) looks to be in good cosmetic condition, showing some signs of wear.
    Among other things, this system features a large Plasma Vacuum Chamber, an RF Services RFS 5004A RF Match (p/n 232393-02A) with Rack Mount Controller, three Sorensen DCS8-125 DC Power Supplies (8VDC, 125A), an MKS 146 Vacuum Gauge Measurement & Control System, an MKS PDR 9000 Vacuum Gauge Controller, an MKS Baratron 626A12TBE Pressure Transducer (1000 Torr), two MKS Baratron 120AA-000.1RAJ Pressure Transducers (0.1 Torr), am MKS 907 Series Gauge (109070011CE), an HVA 10" Conflat Gate Valve, an MDC GV-4000V-P Gate Valve, an Inficon BPG400 Vacuum Gauge (353-503), and a Load Lock Chamber with "Surface Interface" Manual Linear Feedthrough Actuator, as shown.
    I have no way of testing this system, or any of its components, and it is being sold as-is.
    I am not sure how complete this machine is, but it appears to be missing at least two Turbo Vacuum Pumps and their controllers.
    Approximate overall unpacked dimensions of the main chamber assembly: 87"L x 52"W x 98"H.
    Approximate overall unpacked dimensions of the load lock actuator assembly: 59"L x 21"W x 48"H.
    Approximate overall unpacked dimensions of the cabinet: 26"L x 25"W x 57"H.
    Due to the size and weight of these items, one or more custom pallets or crates will be needed to ship them, the cost of which will be the responsibility of the buyer.
    Please ask questions or indicate concerns prior to bidding. By placing a bid, you agree to all stated terms. All auctions are sold as advertised, as is and without warranty, unless otherwise stated in the item description. No software, power cords, or other accessories are included unless stated above. See additional terms of the auction below.
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